PRECISION GAS FLOW METERS & GAS FLOW CONTROLLERS

Capillary Mass Flow Meters and Controllers

Premium Capillary Mass Flow Meters and Mass Flow Controllers for Gases

The SmartTrakĀ® thermal mass flow meters and mass flow controllers are true multi-gas digital MFC designed to deliver smooth, stable, accurate, and repeatable gas mass flow control you can rely on, every time.

Note: SmartTrakĀ® series units are available in Europe only!

  • Gas Mass flow meter and controller based on capillary technology with up to 0.5% full scale accuracy
  • All wetted parts stainless steel, 0.8 Ra Āµm electro polished surfaces. Cleanroom assembly possible
  • Ranges from 0-4 mln/min to 0-1000 ln/min
  • Every units has 10 pre-programmed gases, customer selectable
  • Choice of customer selectable engineering units, gases, outputs, range, etc.
  • Due to the advanced engineering, accuracy for every gas selected
  • Operating pressure standard 35 barg, optional up to 20 ln/min 345 barg
  • Suitable for most corrosive and aggressive dry and clean gases
  • Optional local display and local setpoint/configuration
  • Most analogue and RS232 communication standard on each unit
  • Active temperature compensation for temperature independent operation
  • Strong direct driven valve
  • Optional Modbus and Profibus communication
  • Modbus module with analogue input/outputs and I/O alarm contacts
  • Wide choice of elastomers and valve seal materials
  • Long term stability sensor
  • Free configuration software for MS Windows
  • Very low pressure differentials possible due to big valve
  • Every unit calibrated with Primary NIST traceable high accuracy reference standard

Device Types SmartTrakĀ® series

SmartTrakĀ®101 Micro Flow Capillary Gas Flow Meter and Controller

 

SmartTrakĀ® 101 (Āµ-flow)
Capillary Mass Flow Meters and Mass Flow Controllers
Flows fromĀ  0-4 mln/min

SmartTrakĀ®100 High Pressure Capillary Gas Flow Meter and Controller

 

SmartTrakĀ® 100HP (High Pressure)
Capillary Mass Flow Meters and Mass Flow Controllers
Flows from 0-100 mln/min to 0-20 ln/min
Up to 345 barg (5000 psig) (Max. 20 ln/min)

SmartTrakĀ®100 Low Flow Capillary Gas Flow Meter and Controller

 

SmartTrakĀ® 100L (Low Flow)
Capillary Mass Flow Meters and Mass Flow Controllers
Flows from 0-10 mln/min to 0-50 ln/min

SmartTrakĀ®100 Medium Flow Capillary Gas Flow Meter and Controller

 

SmartTrakĀ® 100M (Medium Flow)
Capillary Mass Flow Meters and Mass Flow Controllers
Flows from 0-20 to 0-200 ln/min

SmartTrakĀ®100 High Flow Capillary Gas Flow Meter and Controller

 

SmartTrakĀ® 100H (High Flow)
Capillary Mass Flow Meters and Mass Flow Controllers
Flows from 0-100 to 0-1000 ln/min

Interfaces SmartTrakĀ® series

SmartTrakĀ®100 Capillary Gas Flow Meter with RS232 Interface

 

SmartTrak@ series
Standard version with analog signals and digital RS232 interface

SmartTrakĀ®100 Capillary Gas Flow Meter with local display (Pilot Module)

 

SmartTrak@ series / Pilot Module
Optional version with local display interface (Pilot Module)

SmartTrakĀ®100 Capillary Gas Flow Meter with remote display (Remote Pilot Module)

 

SmartTrak@ series / Remote Pilot Module
Optional version with remote display interface (Remote Pilot Module)

SmartTrakĀ®100 Capillary Gas Flow Meter with RS485 Interface

 

SmartTrak@ series with Modbus RTU
Optional version with Modbus RTU interface (RS485)

SmartTrakĀ®100 Capillary Gas Flow Meter with RS485 Interface and local display

 

SmartTrak@ series with Modbus/Display
Optional version with Modbus RTU interface (RS485) and local display

SmartTrakĀ®100 Capillary Gas Flow Meter with Profibus interface

 

SmartTrak@ series with Profibus
Optional version with Profibus DP interface (RS485)

Technical Specifications SmartTrakĀ® series

Measuring ranges
Air/Full scale freely selectableSmartTrakĀ® 101 (Āµ-flow): 0-4 mln/min
SmartTrakĀ® 100HP (High Pressure): 0-100 mln/min to 0-20 ln/min
SmartTrakĀ® 100L (Low Flow): 0-10 mln/min to 0-50 ln/min
SmartTrakĀ® 100M (Medium Flow): 0-20 to 0-200 ln/min
SmartTrakĀ® 100H (High Flow): 0-100 to 0-1000 ln/min

Flow ranges specified are for an equivalent flow of nitrogen at 1013.25 mbara
(760 mm Hg) and 0Ā°C (32Ā°F)
For other gases and reference conditions please contact the factory.

Instrument versions
“Standard”
The economic solution
Accuracy: Ā± 1.0% of full scale*
Turndown ratio: 1 : 50 (Controller), 1 : 100 (Meter)
“Hi-Performance”
With high accuracy
Accuracy: Ā± 0.5% of full scale*
Including 10 point certificate
Hi-performance is only possible for:
Flows from 10 mln/min to 1000 ln/min for air only
Flows from 10 mln/min to 50 ln/min (Air equivalent) for Nitrogen, Helium, or Argon
Other gases and flow: Contact the factory
Only valid for units up to an operating pressure of 10 barg and over the temperature range
10Ā°C to 30Ā°C in a horizontal position.
The accuracy is only guaranteed under calibrated conditions and is only valid for a period of 6 months after the date of calibration.
Valid for 10 to 100% of FS.

*An additional error of Ā±0.25% may apply for analogue signals

Performance Data
Media (real gas calibration)All gases and gas mixtures that are compatible with the selected material.
There might be limitations to some corrosive gases
Response time2 seconds (typical) to within Ā± 2% of final value (includes settling time),
faster or slower available upon request (controllers only)
RepeatabilityĀ± 0.2% of full scale (according to SEMI standard E56-0309)
Longterm stabilityTypical < 2% of measured value / year
Power supplyMass Flow Meters:
15-24 VDC Ā±10%, (230 mA, regulated)
Mass Flow Controllers:
C100L: 24 VDC Ā±10% (500 mA, regulated)
C100L High Pressure: 24 VDC Ā±10% (500 mA, regulated)
C100M: 24 VDC Ā±10%, (800 mA, regulated)
C100H: 24 VDC Ā±10%, (1260 mA, regulated)
(ripple should not exceed 100 mV peak-to-peak)
Operation pressure0-35 bargā€‰(0 ā€“ 500 psig)
High Pressure option 345 barg (5000 psig) (Max. 20 ln/min)
Temperature (environment/gas)0 ā€“ 50Ā°C (32 ā€“ 122Ā°F)
Pressure sensitivity<0.15%ā€‰/ā€‰bar (<0.01%ā€‰/ā€‰psi) FS (typical N2, horizontal mount)
Temperature sensitivity<0.05% FS measuring range type per 1Ā°C (<0.025% per 1Ā°F)
Warm-up time< 15 min for full accuracy
Materials
Meter all wetted metal parts316SS (1.4404)
Controller body/sensor materials316SS (1.4404)
Controllers valve post materialsC100L/C101: 316SS/410SS/430SS (1.4404/1.4006/1.4016)
C100M: 416SS/430SS (1.4005/1.4016)
C100H: 316SS/416SS/430SS (1.4404/1.4005/1.4016)
Electronic HousingPowder coated steel
SealsFKM (VitonĀ®) Options: Neoprene, EPDM (FDA) or FFKM (KalrezĀ®)
Valve sealsFKM (VitonĀ®) Options: Neoprene, EPDM (FDA) or FFKM (KalrezĀ®)
Integration & Installation
Output signals analogLinear 4ā€“20 mA or 0-20 mA, 500 ohms maximum loop resistance
and one of the following (user selectable):
Linear 0ā€“5 VDC, 1000 ohms minimum load resistance
Linear 0-10 VDC, 1000 ohms minimum load resistance
Linear 1-5 VDC, 1000 ohms minimum load resistance
Setpoint signals analogAnalog (choice of one, user selectable):
Linear 4ā€“20 mA, 0-20 mA. 0ā€“5 VDC, 0-10 VDC, 1-5 VDC
Output signals digitalRS232 Optional: RS485; Modbus RTU (Slave), Profibus DP
Process connectionFittings included. Options: SwagelokĀ® (Compression), VCR, VCO, NPT
Inlet sectionNone required
Electrical connectionD-15 High density plug (15 pins) female
Mounting orientationAll orientations are possible but must be defined at time of order
Safety
Burst pressure52 bar (240 psi), 100HP 500 bar (7500 psi)
Leak rate< 1 x 10-9 mbar l/s He
Ingress protection classIP20ā€‰
EMCEN 61326-1
ATEX CertificationNone

SmartTrakĀ® series Configuration Software

Communication with the SmartTrakĀ® series over RS232
Recommended cables: 100-CRN + Optional 100-SerialUSB

Ā» Download SmartTrakĀ® series Configuration Software

SmartTrakĀ® series COMPOD Configuration Terminal Software

To set the communication settings in a COMPOD a terminal software is required.
The free software PuTTY or Windows HyperTerminal can be used.
For further instructions see chapter 7 on the COMPOD operating instructions.
Recommended cables: 100-CRC and RS485 to USB converter

Ā» Download free Putty Software

SmartTrakĀ® series DLL Files

The SmartTrakĀ® DLL helps the customer to create their own software, exactly according to their specifications.
The DLL handles all communication, synchronization and guards line stability.

Ā» Download SmartTrakĀ® series DLL Files

For Labview drivers please contact the factory.

Introducing SmartTrakĀ® series Capillary Mass Flow Meters and Controllers for Gases

SmartTrakĀ® series Capillary Mass Flow Meters and Controllers Measuring Principle

SmartTrakĀ® series Capillary Mass Flow Meters and Controllers Connection & Setup

Downloads SmartTrakĀ® series

vog-smarttrak100-datasheet-de.pdfSmartTrakĀ® 100 Product InformationProduct DatasheetsEN, DEEN, DE
vog-smarttrak100-HP-datasheet-de.pdfSmartTrakĀ® 100HP Product InformationProduct DatasheetsEN, DEEN, DE
vog-smarttrak101-datasheet-de.pdfSmartTrakĀ® 101 Product InformationProduct DatasheetsEN, DEEN, DE
811-1224_ml_smarttrak100_QSG.pdfSmartTrakĀ® series Quick Start GuideOperating InstructionsEN, DEEN, DE
vog-smarttrak-manual-de.pdfSmartTrakĀ® series Operating instructionsOperating InstructionsEN, DEEN, DE
vog-smarttrak-configuration-software.zipSmartTrakĀ® series Configuration SoftwareSoftwareEN
vog-smarttrak-dll-files.zipSmartTrakĀ® series DLL FilesSoftwareMLML
vog-smarttrak-compod-de.pdfSmartTrakĀ® series COMPOD Interface DatasheetProduct DatasheetsEN, DEEN, DE
vog-smarttrak-power-supply-configurations-de.pdfSmartTrakĀ® 100 Power Supply & Cabling OptionsAccessories DatasheetsEN, DEEN, DE
vog-smarttrak-manual-compod-de.pdfSmartTrakĀ® series COMPOD Operating instructionsOperating InstructionsEN, DEEN, DE
vog-ads-smarttrak-100-hp.xlsApplication Data Sheet SmartTrakĀ® series 100 HPInquiry FormsMLML
vog-ads-smarttrak-100-series.xlsApplication Data Sheet SmartTrakĀ® series 100 / 101Inquiry FormsMLML
vog-ads-smarttrak-compod-module-ads.xlsApplication Data Sheet SmartTrakĀ® series Compod ModuleInquiry FormsMLML
vog-smarttrak-corrosive-gas-policy.pdfSmartTrakĀ® series Corrosive Gas PolicyCertificates/StatementsMLML