PRECISION GAS FLOW METERS & GAS FLOW CONTROLLERS

Premium Capillary Mass Flow Meters and Mass Flow Controllers for Gases

The SmartTrak® thermal mass flow meters and mass flow controllers are true multi-gas digital MFC designed to deliver smooth, stable, accurate, and repeatable gas mass flow control you can rely on, every time.

Note: SmartTrak® series units are available in Europe only!

  • Gas Mass flow meter and controller based on capillary technology with up to 0.5% full scale accuracy
  • All wetted parts stainless steel, 0.8 Ra µm electro polished surfaces. Cleanroom assembly possible
  • Ranges from 0-4 mln/min to 0-1000 ln/min
  • Every units has 10 pre-programmed gases, customer selectable
  • Choice of customer selectable engineering units, gases, outputs, range, etc.
  • Due to the advanced engineering, accuracy for every gas selected
  • Operating pressure standard 35 barg
  • Suitable for most corrosive and aggressive dry and clean gases
  • Optional local display and local setpoint/configuration
  • Most analogue and RS232 communication standard on each unit
  • Active temperature compensation for temperature independent operation
  • Strong direct driven valve
  • Optional Modbus communication
  • Modbus module with analogue input/outputs and I/O alarm contacts
  • Wide choice of elastomers and valve seal materials
  • Long term stability sensor
  • Free configuration software for MS Windows
  • Very low pressure differentials possible due to big valve
  • Every unit calibrated with Primary NIST traceable high accuracy reference standard

Device Types SmartTrak® series

SmartTrak®101 Micro Flow Capillary Gas Flow Meter and Controller

 

SmartTrak® 101 (µ-flow)
Capillary Mass Flow Meters and Mass Flow Controllers
Flows from  0-4 mln/min

SmartTrak®100 Low Flow Capillary Gas Flow Meter and Controller

 

SmartTrak® 100L (Low Flow)
Capillary Mass Flow Meters and Mass Flow Controllers
Flows from 0-10 mln/min to 0-50 ln/min

SmartTrak®100 Medium Flow Capillary Gas Flow Meter and Controller

 

SmartTrak® 100M (Medium Flow)
Capillary Mass Flow Meters and Mass Flow Controllers
Flows from 0-20 to 0-200 ln/min

SmartTrak®100 High Flow Capillary Gas Flow Meter and Controller

 

SmartTrak® 100H (High Flow)
Capillary Mass Flow Meters and Mass Flow Controllers
Flows from 0-100 to 0-1000 ln/min

Interfaces SmartTrak® series

SmartTrak®100 Capillary Gas Flow Meter with RS232 Interface

 

SmartTrak@ series
Standard version with analog signals and digital RS232 interface

SmartTrak®100 Capillary Gas Flow Meter with local display (Pilot Module)

 

SmartTrak@ series / Pilot Module
Optional version with local display interface (Pilot Module)

SmartTrak®100 Capillary Gas Flow Meter with remote display (Remote Pilot Module)

 

SmartTrak@ series / Remote Pilot Module
Optional version with remote display interface (Remote Pilot Module)

SmartTrak®100 Capillary Gas Flow Meter with RS485 Interface

 

SmartTrak@ series with Modbus RTU
Optional version with Modbus RTU interface (RS485)

SmartTrak®100 Capillary Gas Flow Meter with RS485 Interface and local display

 

SmartTrak@ series with Modbus/Display
Optional version with Modbus RTU interface (RS485) and local display

Technical Specifications SmartTrak® series

Measuring ranges
Air/Full scale freely selectable SmartTrak® 101 (µ-flow): 0-4 mln/min
SmartTrak® 100L (Low Flow): 0-10 mln/min to 0-50 ln/min
SmartTrak® 100M (Medium Flow): 0-20 to 0-200 ln/min
SmartTrak® 100H (High Flow): 0-100 to 0-1000 ln/min

Flow ranges specified are for an equivalent flow of nitrogen at 1013.25 mbara
(760 mm Hg) and 0°C (32°F)
For other gases and reference conditions please contact the factory.

Instrument versions
“Standard”
The economic solution
Accuracy: ± 1.0% of full scale*
Turndown ratio: 1 : 50 (Controller), 1 : 100 (Meter)
“Hi-Performance”
With high accuracy
Accuracy: ± 0.5% of full scale*
Including 10 point certificate
Hi-performance is only possible for:
Flows from 10 mln/min to 1000 ln/min for air only
Flows from 10 mln/min to 50 ln/min (Air equivalent) for Nitrogen, Helium, or Argon
Other gases and flow: Contact the factory
Only valid for units up to an operating pressure of 10 barg and over the temperature range
10°C to 30°C in a horizontal position.
The accuracy is only guaranteed under calibrated conditions and is only valid for a period of 6 months after the date of calibration.
Valid for 10 to 100% of FS.

*An additional error of ±0.25% may apply for analogue signals

Performance Data
Media (real gas calibration) All gases and gas mixtures that are compatible with the selected material.
There might be limitations to some corrosive gases
Response time 2 seconds (typical) to within ± 2% of final value (includes settling time),
faster or slower available upon request (controllers only)
Repeatability ± 0.2% of full scale (according to SEMI standard E56-0309)
Longterm stability Typical < 2% of measured value / year
Power supply Mass Flow Meters:
15-24 VDC ±10%, (230 mA, regulated)
Mass Flow Controllers:
C100L: 24 VDC ±10% (500 mA, regulated)
C100M: 24 VDC ±10%, (800 mA, regulated)
C100H: 24 VDC ±10%, (1260 mA, regulated)
(ripple should not exceed 100 mV peak-to-peak)
Operation pressure 0-35 barg (0 – 500 psig)
Temperature (environment/gas) 0 – 50°C (32 – 122°F)
Pressure sensitivity <0.15% / bar (<0.01% / psi) FS (typical N2, horizontal mount)
Temperature sensitivity <0.05% FS measuring range type per 1°C (<0.025% per 1°F)
Warm-up time < 15 min for full accuracy
Materials
Meter all wetted metal parts 316SS (1.4404)
Controller body/sensor materials 316SS (1.4404)
Controllers valve post materials C100L/C101: 316SS/410SS/430SS (1.4404/1.4006/1.4016)
C100M: 416SS/430SS (1.4005/1.4016)
C100H: 316SS/416SS/430SS (1.4404/1.4005/1.4016)
Electronic Housing Powder coated steel
Seals FKM (Viton®) Options: Neoprene, EPDM (FDA) or FFKM (Kalrez®)
Valve seals FKM (Viton®) Options: Neoprene, EPDM (FDA) or FFKM (Kalrez®)
Integration & Installation
Output signals analog Linear 4–20 mA or 0-20 mA, 500 ohms maximum loop resistance
and one of the following (user selectable):
Linear 0–5 VDC, 1000 ohms minimum load resistance
Linear 0-10 VDC, 1000 ohms minimum load resistance
Linear 1-5 VDC, 1000 ohms minimum load resistance
Setpoint signals analog Analog (choice of one, user selectable):
Linear 4–20 mA, 0-20 mA. 0–5 VDC, 0-10 VDC, 1-5 VDC
Output signals digital RS232 Optional: RS485; Modbus RTU (Slave)
Process connection Fittings included. Options: Swagelok® (Compression), VCR, VCO, NPT
Inlet section None required
Electrical connection D-15 High density plug (15 pins) female
Mounting orientation All orientations are possible but must be defined at time of order
Safety
Burst pressure 52 bar (240 psi)
Leak rate < 1 x 10-9 mbar l/s He
Ingress protection class IP20 
EMC EN 61326-1
ATEX Certification None

SmartTrak® series Configuration Software

Communication with the SmartTrak® series over RS232
Recommended cables: 100-CRN + Optional 100-SerialUSB

» Download SmartTrak® series Configuration Software

SmartTrak® series COMPOD Configuration Terminal Software

To set the communication settings in a COMPOD a terminal software is required.
The free software PuTTY or Windows HyperTerminal can be used.
For further instructions see chapter 7 on the COMPOD operating instructions.
Recommended cables: 100-CRC and RS485 to USB converter

» Download free Putty Software

SmartTrak® series DLL Files

The SmartTrak® DLL helps the customer to create their own software, exactly according to their specifications.
The DLL handles all communication, synchronization and guards line stability.

» Download SmartTrak® series DLL Files

For Labview drivers please contact the factory.

Introducing SmartTrak® series Capillary Mass Flow Meters and Controllers for Gases

SmartTrak® series Capillary Mass Flow Meters and Controllers Measuring Principle

SmartTrak® series Capillary Mass Flow Meters and Controllers Connection & Setup

Downloads SmartTrak® series

vog-smarttrak100-datasheet-de.pdfSmartTrak® 100 Product InformationProduct DatasheetsEN, DEEN, DE
vog-smarttrak101-datasheet-de.pdfSmartTrak® 101 Product InformationProduct DatasheetsEN, DEEN, DE
811-1224_ml_smarttrak100_QSG.pdfSmartTrak® series Quick Start GuideOperating InstructionsEN, DEEN, DE
vog-smarttrak-manual-de.pdfSmartTrak® series Operating instructionsOperating InstructionsEN, DEEN, DE
vog-smarttrak-configuration-software.zipSmartTrak® series Configuration SoftwareSoftwareEN
vog-smarttrak-dll-files.zipSmartTrak® series DLL FilesSoftwareMLML
vog-smarttrak-compod-de.pdfSmartTrak® series COMPOD Interface DatasheetProduct DatasheetsEN, DEEN, DE
vog-smarttrak-power-supply-configurations-de.pdfSmartTrak® 100 Power Supply & Cabling OptionsAccessories DatasheetsEN, DEEN, DE
vog-smarttrak-manual-compod-de.pdfSmartTrak® series COMPOD Operating instructionsOperating InstructionsEN, DEEN, DE
vog-ads-smarttrak-100-series.xlsApplication Data Sheet SmartTrak® series 100 / 101Inquiry FormsMLML
vog-ads-smarttrak-compod-module-ads.xlsApplication Data Sheet SmartTrak® series Compod ModuleInquiry FormsMLML
399-3038_ml-smarttrak-conformity-ce.pdfSmartTrak® series Declaration of Conformity CECertificates/StatementsEN, DEEN, DE
399-3039_ml-smarttrak-conformity-ukca.pdfSmartTrak® series Declaration of Conformity UKCACertificates/StatementsEN, DEEN, DE
vog-smarttrak-corrosive-gas-policy.pdfSmartTrak® series Corrosive Gas PolicyCertificates/StatementsMLML