| Measuring ranges |
|
| Air/Full scale freely selectable |
SmartTrak® 100L (Low Flow): 0-10 mln/min to 0-50 ln/min SmartTrak® 100M (Medium Flow): 0-20 to 0-200 ln/min SmartTrak® 100H (High Flow): 0-100 to 0-500 ln/min Flow ranges specified are for an equivalent flow of nitrogen at 1013.25 mbara (760 mm Hg) and 0°C (32°F) For other gases and reference conditions please contact the factory. |
| Instrument versions |
|
“Standard” The economic solution |
Accuracy: ± 1.0% of full scale* Turndown ratio: 1 : 50 (Controller), 1 : 100 (Meter) |
“Hi-Performance” With high accuracy |
Accuracy: ± 0.5% of full scale* Including 10 point certificate Hi-performance is only possible for: Flow range: up to 50 slpm or nlpm (valid from 10 to 100% of the calibrated range) Gases: Air, Nitrogen, Helium or Argon Other gases and flow: Contact the factory Only valid for units up to an operating pressure of 10 barg and over the temperature range 10°C to 30°C in a horizontal position. The accuracy is only guaranteed under calibrated conditions and is only valid for a period of 6 months after the date of calibration. Valid for 10 to 100% of FS.
*An additional error of ±0.25% may apply for analogue signals |
| Performance Data |
|
| Media (real gas calibration) |
All gases and gas mixtures that are compatible with the selected material. There might be limitations to some corrosive gases |
| Response time |
2 seconds (typical) to within ± 2% of final value (includes settling time), faster or slower available upon request (controllers only) |
| Repeatability |
± 0.2% of full scale (according to SEMI standard E56-0309) |
| Longterm stability |
Typical < 2% of measured value / year |
| Power supply |
Mass Flow Meters: 15-24 VDC ±10%, (230 mA, regulated) Mass Flow Controllers: C100L: 24 VDC ±10% (500 mA, regulated) C100M: 24 VDC ±10%, (800 mA, regulated) C100H: 24 VDC ±10%, (1260 mA, regulated) (ripple should not exceed 100 mV peak-to-peak) |
| Operation pressure |
0-35 barg (0 – 500 psig) |
| Temperature (environment/gas) |
0 – 50°C (32 – 122°F) |
| Pressure sensitivity |
<0.15% / bar (<0.01% / psi) FS (typical N2, horizontal mount) |
| Temperature sensitivity |
<0.05% FS measuring range type per 1°C (<0.025% per 1°F) |
| Warm-up time |
< 15 min for full accuracy |
| Materials |
|
| Meter all wetted metal parts |
316SS (1.4404) |
| Controller body/sensor materials |
316SS (1.4404) |
| Controllers valve post materials |
C100L/C101: 316SS/410SS/430SS (1.4404/1.4006/1.4016) C100M: 416SS/430SS (1.4005/1.4016) C100H: 316SS/416SS/430SS (1.4404/1.4005/1.4016) |
| Electronic Housing |
Powder coated steel |
| Seals |
FKM (Viton®) Options: Neoprene |
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| Valve seals |
FKM (Viton®) Options: Neoprene, Kalrex® |
| Integration & Installation |
|
| Output signals analog |
Linear 4–20 mA or 0-20 mA, 500 ohms maximum loop resistance and one of the following (user selectable): Linear 0–5 VDC, 1000 ohms minimum load resistance Linear 0-10 VDC, 1000 ohms minimum load resistance Linear 1-5 VDC, 1000 ohms minimum load resistance |
| Setpoint signals analog |
Analog (choice of one, user selectable): Linear 4–20 mA, 0-20 mA. 0–5 VDC, 0-10 VDC, 1-5 VDC |
| Output signals digital |
RS232 Optional: RS485; Modbus RTU (Slave) |
| Process connection |
Fittings included. Options: Swagelok® (Compression), VCR, VCO, NPT |
| Inlet section |
None required |
| Electrical connection |
D-15 High density plug (15 pins) female |
| Mounting orientation |
All orientations are possible but must be defined at time of order |
| Safety |
|
| Burst pressure |
52 bar (240 psi) |
| Leak rate |
< 1 x 10-9 mbar l/s He |
| Ingress protection class |
IP20 |
| EMC |
EN 61326-1 |
| ATEX Certification |
None |