High-precision Thermal Mass Flow Meters & Mass Flow Controllers for Gases
Reliable technology and industry standard interfaces make the red-y smart series thermal mass flow meters (MFM) and mass flow controllers (MFC) particularly suitable for measurement and control in gas delivery systems and plant engineering applications.
Types & Options red-y smart series
red-y smart meter GSM
High-precision Thermal Mass Flow Meter
Flow up to 60 ln/min (64 SLPM)
Body size ¼”
Anodized aluminium version
red-y smart controller GSC
High-precision Thermal Mass Flow Controller
Flow up to 60 ln/min (64 SLPM)
Body size ¼”
Anodized aluminium version
Flow up to 450 ln/min (480 SLPM)
Body size is ½”
Stainless Steel Versions
All mass flow meters and mass flow controllers are available in stainless steel electropolished.
Profinet RT and EtherCAT Interface
All mass flow meters and mass flow controllers are available with Profinet RT and EtherCAT interface.
Customized OEM Solutions:
Optimize and simplify your processes with our customized & modular flow solutions
For a wide range of applications the thermal mass flow meters and mass flow controllers offer you a significant optimization and simplification of your processes.
Technical Specifications red-y smart series
Measuring ranges | |
---|---|
Air/Full scale freely selectable | Body size ¼” from 0 … 25 mln/min to 0 … 60 ln/min (from 0 … 27 SCCM to 0 … 64 SLPM) Body size ½” from 0 … 60 ln/min to 0 … 450 ln/min (from 0 … 65 SLPM to 0 … 480 SLPM) |
Instrument versions | |
“Standard” The economic solution |
Accuracy: ± 1.0% of full scale* Turndown ratio: 1 : 50 |
“Hi-Performance” With highest accuracy and turndown ratio (available for GSM < 200 ln/min (200 SLPM) / GSC < 150 ln/min (150 SLPM) (air)) |
Accuracy: ± 0.3% of full scale + ± 0.5% of reading* Turndown ratio: 1 : 100 *An additional error of ±0.25% may apply for analogue signals |
Performance Data | |
Media (real gas calibration) | Air*, O2*, N2, He, Ar, CO2, H2, CH4, C3H8 (other gases and gas mixtures on request) *O2 & N2 are calibrated with air |
Response time | Meter (GSM): ± 80ms*; Controller (GSC): ± 500ms* *depending on device configuration & according to SEMI standard E17-1011, 5-100% of range under optimized conditions |
Repeatability | ± 0.2% of full scale (according to SEMI standard E56-0309) |
Longterm stability | < 1% of measured value / year |
Power supply | 24 Vdc (18 – 30 Vdc), 15 Vdc on request |
Current consumption Standard | Meter (GSM): max. 100 mA; Controller (GSC): max. 250 mA (GSC with valve type 8 max. 490mA) |
Current consumption Profinet RT / EtherCAT | Meter (GSM): max. 125 mA; Controller (GSC): max. 340 mA (GSC with valve type 8 max. 560mA) |
Operation pressure | 0.2 – 11 bar a (3 – 160 psia) / GSC with valve type 4.5 and 8 max. 8 bar a (120 psia) |
Temperature (environment/gas) | 0 – 50°C (32 – 122°F) |
Body Materials | Anodized aluminum, optional stainless steel electropolished |
Seals | FKM, EPDM, optional FFKM |
Pressure sensitivity | < 0.2% / bar of reading (typical N2) |
Temperature sensitivity | 0.025% FS measuring range type per 1°C (<0.012% per 1°F) |
Warm-up time | < 1 sec. for full accuracy |
Integration & Installation | |
Output signals analog | 0-20 mA, 4-20 mA, 0-5 V, 1-5 V, 0-10 V, 2-10 V |
Output signals digital | RS-485; Modbus RTU (Slave); LabView-VIs available Option: Profibus DP-V0, DP-V1 / Profinet RT / EtherCAT |
Process connection | G¼” (BSPP* female) up to 60 ln/min (64 SLPM) G½” (BSPP* female) up to 450 ln/min (480 SLPM) *British Standard Pipe Parallel |
Inlet section | None required |
Electrical connection | Sub D plug, 9 pole |
Mounting orientation | Any position (consult manufacturer above 5 bar or vertical mounting) |
Safety | |
Test pressure | 16 bara (240 psia) |
Leak rate | < 1 x 10-6 mbar l/s He |
Ingress protection class | IP50 |
EMC | EN 61326-1 |
Connection cables, power supplies
A wide range of cables and power supply units for fast integration of the red-y smart mass flow meters and controllers is available:
- Cables for communication with PC (USB)
- Cables for analog communication
- Power supply (24 Vdc)
Display and control devices
Permit the operation of up to 10 flow meters and controllers with predefined process recipes.
Gas Collection Systems
The gas collection systems enable the easy integration of several digital flow meters and flow controllers into one combined system..
Compression fittings with 50μ filter/ Stainless steel 1.4404 / 316L
Type/Connection | Seals in FKM | Seals in EPDM |
G1/4″ to 6mm | Part-N° 328-1011 | Part-N° 328-1031 |
G1/4″ to 1/4″ | Part-N° 328-1012 | Part-N° 328-1032 |
G1/4″ to 12mm | Part-N° 328-1013 | Part-N° 328-1033 |
G1/4″ to 1/2″ | Part-N° 328-1014 | Part-N° 328-1034 |
G1/2″ to 12mm” | Part-N° 328-1006 | Part-N° 328-1026 |
G1/2″ to 1/2″ | Part-N° 328-1007 | Part-N° 328-1027 |
Tri-Clamp fittings
Type/Connection | Seals in EPDM |
G 1/4″ to D 25 | 328-1421 |
G 1/2″ to D 50.5 | 328-1424 |
Vacuum fitting (identical to VCR®)
Type/Connection | Seals in FKM | |
G1/4″ / 1/4″ VCR | Part-N° 328-1190 | |
G1/2″ / 1/2″ VCR | Part-N° 328-1191 |
VCO® & VCR® are registered Trademarks of Swagelok
Vacuum fitting flange-mounted (identical to VCR®)
Type/Connection | Seals in FKM | Seals in EPDM |
G1/4″ / 1/4″ VCR | Part-N° 328-1192 | Part-N° 328-1193 |
VCO® & VCR® are registered Trademarks of Swagelok
Male stud fittings Legris / Brass
Type/Connection | Seals in NBR | |
G1/4″ to 6mm | Part-N° 328-1211 | |
G1/4″ to 8mm | Part-N° 328-1212 | |
G1/4″ to 10mm | Part-N° 328-1213 | |
G1/2″ to 8mm | Part-N° 328-1216 | |
G1/2″ to 12mm | Part-N° 328-1214 | |
G1/2″ to 14mm | Part-N° 328-1215 |